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Materials, Vol. 11, Pages 1089: Enhancement on the Surface Hydrophobicity and Oleophobicity of an Organosilicon Film by Conformity Deposition and Surface Fluorination Etching

Materials, Vol. 11, Pages 1089: Enhancement on the Surface Hydrophobicity and Oleophobicity of an Organosilicon Film by Conformity Deposition and Surface Fluorination Etching

Materials doi: 10.3390/ma11071089

Authors: Zheng-Wen Xu Yu-Kai Zhang Tai-Hong Chen Jin-How Chang Tsung-Hsin Lee Pei-Yu Li Day-Shan Liu

In this work, the surface morphology of a hydrophobic organosilicon film was modified as it was deposited onto a silver seed layer with nanoparticles. The surface hydrophobicity evaluated by the water contact angle was significantly increased from 100° to 128° originating from the surface of the organosilicon film becoming roughened, and was deeply relevant to the Ag seed layer conform deposition. In addition, the organosilicon film became surface oleophobic and the surface hydrophobicity was improved due to the formation of the inactive C-F chemical on the surface after the carbon tetrafluoride glow discharge etching. The surface hydrophobicity and oleophobicity of the organosilicon film could be further optimized with water and oleic contact angles of about 138° and 61°, respectively, after an adequate fluorination etching.

Autoren:   Xu, Zheng-Wen ; Zhang, Yu-Kai ; Chen, Tai-Hong ; Chang, Jin-How ; Lee, Tsung-Hsin ; Li, Pei-Yu ; Liu, Day-Shan
Journal:   Materials
Band:   11
Ausgabe:   7
Jahrgang:   2018
Seiten:   1089
DOI:   10.3390/ma11071089
Erscheinungsdatum:   26.06.2018
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