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Ion optical effects in a low pressure rf plasma

Ion optical effects in low pressure gas discharges are introduced as a novel input into low pressure plasma technology. They are based on appropriate geometrical plasma confinements which enable a control of the shape of internal density and potential distributions and, hence, the ion motion in the plasma bulk. Such effects are exemplified for an electron cyclotron wave resonance plasma in Ar at 1–5 × 10−3 millibars. The geometry of the plasma chamber is modified by a conical and a cylindrical insert. Computer simulations display spherical plasma density contours to be formed around the conical confinement. This effects an increase of the ratio of the ion currents into the conical and the cylindrical inserts which depends on the fourth power of the plasma electron temperature. A quantitative understanding of this behavior is presented. As another essential result, the shape of the internal plasma contours is found to be independent of the pressure controlled plasma parameters.

Autoren:   Hans Oechsner and Hubert Paulus
Journal:   Journal of Vacuum Science & Technology B
Band:   31
Ausgabe:   6
Jahrgang:   2013
Seiten:   061309
DOI:   10.1116/1.4823104
Erscheinungsdatum:   27.09.2013
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