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Control of the structure and density of silver nanoparticles obtained by laser-induced chemical deposition from liquids

04.10.2013 | Carlos A. Jarro, Matthew Bresin, and J. Todd Hastings, Journal of Vacuum Science & Technology B, 2013

Silver nanoparticles have been obtained by photoreduction from solutions during the last two decades, but the growth of differently structured silver nanoparticles directly onto transparent substrates has not been a major area of research. An analysis of silver deposition on glass substrates has ...


Multispecies focused ion beam lithography system and its applications

04.10.2013 | Sven Bauerdick, Lars Bruchhaus, Paul Mazarov, Achim Nadzeyka, Ralf Jede et al., Journal of Vacuum Science & Technology B, 2013

The authors present a focused ion beam lithography (IBL) instrument and its extension toward using different ion species beyond gallium. The base instrument utilizes a lithography architecture and an ion source and column dedicated to nanofabrication. This includes large area navigation and ...


Accuracy of wafer level alignment with substrate conformal imprint lithography

04.10.2013 | Robert Fader, Mathias Rommel, Anton Bauer, Maximilian Rumler, Lothar Frey et al., Journal of Vacuum Science & Technology B, 2013

Substrate conformal imprint lithography (SCIL) is an innovative soft lithography method for the transfer of large area nanostructures. This technology was originally invented by Philips Research. With the implementation of the SCIL process on mask aligners, the standard alignment options of a ...


Effect of Mn doping on the structural, optical, and magnetic properties of In2O3 films

04.10.2013 | Shiqi Wang, Yukai An, Lingshen Duan, Huarui Liu, Jiwen Liu et al., Journal of Vacuum Science & Technology B, 2013

(In1−xMnx)2O3 films were grown by radio frequency-magnetron sputtering technique. Effect of Mn doping on the structural, optical, and magnetic properties of films is investigated systematically. The detailed structure analyses suggest that Mn ions substitute for In3+ sites of the In2O3 lattice in ...


Multiple input multiple output controller design to match chamber performance in plasma etching for semiconductor manufacturing

03.10.2013 | Kye Hyun Baek, Kyounghoon P. Han, Gilheyun Choi, Ho-Kyu Kang, Eun Seung Jung et al., Journal of Vacuum Science & Technology B, 2013

In semiconductor manufacturing, multiple chambers utilized for the same process step often experience performance variation. This chamber to chamber performance variation has affected the yield of wafers, but there are no standard procedures to reduce them in semiconductor manufacturing. This ...


Growth of ultra-long free-space-nanowire by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition

03.10.2013 | Dengji Guo, Reo Kometani, Shin'ichi Warisawa, and Sunao Ishihara, Journal of Vacuum Science & Technology B, 2013

Free-space-nanowiring using focused-ion-beam chemical vapor deposition (FIB-CVD) has been demonstrated to enable the fabrication of various innovative three-dimensional (3D) nanodevices with overhanging structures. However, due to the change in growth characteristics, it is difficult to fabricate ...


In-situ plasma cleaning of samples to remove hydrocarbon and/or polydimethylsiloxane prior to ToF-SIMS analysis

02.10.2013 | Vincent S. Smentkowski and C. A. Moore, Journal of Vacuum Science & Technology B, 2013

The surface of many real-life samples that are generated in an industrial research laboratory is often contaminated with adsorbed layers of hydrocarbons and/or silicones [in particular, polydimethylsiloxane (PDMS)]. These surface contaminants can attenuate or mask underlying species of interest, ...


Mechanisms for hyperthermal polyatomic hydrocarbon modification of PMMA surfaces from molecular dynamics simulations

02.10.2013 | Kamal Choudhary, Leah B. Hill, Travis W. Kemper, and Susan B. Sinnott, Journal of Vacuum Science & Technology B, 2013

Classical molecular dynamics simulations are performed to determine the mechanisms by which hyperthermal hydrocarbon polyatomics, which are present in low-energy plasmas, chemically modify polymer surfaces. In particular, C2H, CH3, and C3H5 are deposited on an amorphous poly (methyl methacrylate) ...


Multimode hydrogen depassivation lithography: A method for optimizing atomically precise write times

01.10.2013 | Joshua B. Ballard, Thomas W. Sisson, James H. G. Owen, William R. Owen, Ehud Fuchs et al., Journal of Vacuum Science & Technology B, 2013

A method to enhance the speed of scanning tunneling microscope based hydrogen depassivation lithography is presented. In order to maximize patterning speed while maintaining the capability to retain atomic precision with respect to line edges and feature positions, a multimode technique is used ...


Correlation between electron irradiation defects and applied stress in carbon nanotubes: A molecular dynamics study

01.10.2013 | Masaaki Yasuda, Yoshinori Chihara, Kazuhiro Tada, Hiroaki Kawata, and Yoshihiko Hirai, Journal of Vacuum Science & Technology B, 2013

Molecular dynamics simulations have been performed to study the correlation between electron irradiation defects and applied stress in single-walled carbon nanotubes. The electron irradiation effect is modeled based on the Monte Carlo method using binary collision theory. The simulations show ...


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